Wafer Laser Grooving
(LWS3000)
- Ps Laser grooving to minimize thermal HAZ and heat accumulation in grooving line.
- Ultra stable grooving stage @1,000mm/s with 0.5μm straightness.
- Built-in coating and cleaning module to prevent contamination.
- Multi beams grooving to maximize WPH.
- Minimize energy loss through optical beam shaping.
- Automatic exchange for narrow and wide beam processing.
