BCS series

Feature

The pressure inside the chamber can be changed continuously
from vacuum to pressurization (max 1MPa). Both pressure and temperature can
be programmed.
There are two observation windows (BCS-650G) in the chamber, making it
possible to observe the interior underpressurized and depressurized conditions.
Double chamber design consists of pressure vessel and inner chamber made of stainless steel.
Our original air circulation mechanism using magnet coupling to stabilize temperature distribution in the chamber.
Signal terminals for testing products.

Semi-Conductor Equipment