Wafer Laser Grooving

(LWS3000)

  1. Ps Laser grooving to minimize thermal HAZ and heat accumulation in grooving line.
  2. Ultra stable grooving stage @1,000mm/s with 0.5μm straightness.
  3. Built-in coating and cleaning module to prevent contamination.
  4. Multi beams grooving to maximize WPH.
  5. Minimize energy loss through optical beam shaping.
  6. Automatic exchange for narrow and wide beam processing.

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