FOUP Cleaner
(TCL-FS3000)
Feature
- It can suit on FOUP/ FOSB/ RSP/ Cassette or others which can place on it.
- Using serve motor drive, in addition to IR drying in the spin-drying process, also exclusive use of air nozzle drying to improve drying effect.
- Exclusive on automatic zero return function when shutdown, easy to load up products.
Specification
| Model | TCL-FS3000 |
| Clean Product | FOUP/FOSB/RSP/Cassettes |
| Power | AC220/380V 3Phase 50/60Hz 20Kw |
| Air | 0.6~0.8Mpa 100L/min |
| Dimensions (mm) | D1450 x W1400 x H2310 |
| Weight (kg) | 1200 |