扩张环

ItemWafer SizeThickness (mm)Dimension (mm)
Inner (ID)
Dimension (mm)
Inner (OD)
Dimension (mm)
Outer (ID)
Dimension (mm)
Outer (OD)
T4Under 4″6±0.15122127.8128133
T5Under 5″6±0.15140145.8146152
T6Under 6″6±0.15170177.8178186
T7Under 6″6±0.15195202.8203210
T8SUnder 8″6±0.15225232.7233.5241
T8Under 8″7±0.15227236.8237247
T12Under 12″7±0.15325334.8335345
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