200MM Full-Automatic Dry-resist Film Laminator

(ATM-1100K)

Feature

  1. Lamination pressure on and the temperature of whole wafer surface are uniformed.
  2. DFR lamination roller temperature is precisely controlled.
  3. DFR lamination tension is uniformed (Non-tension lamination and tenting lamination are available.)
  4. Corresponding to protective tape lamination for back-grind process
  5. Environment friendly design (long life consumable parts, minimizing film consumption etc.)
  6. Improved workability

Specification

Item
ATM-1100K
Wafer Size
4″, 5″, 6″, 8″
Film Width130~230mm width
Utilities – Power

AC200V Single phase 50/60Hz 4.0 KVA
Utilities – Air

0.4-0.5Mpa 90NL/min
Utilities – Vacuum sourse~74Kpa
Dimensions
D1,340 X W1,030 X H1,750 mm (signal tower light not including)
Weight
700kg

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