200MM Full-Automatic Dry-resist Film Laminator
(ATM-1100K)
Feature
- Lamination pressure on and the temperature of whole wafer surface are uniformed.
- DFR lamination roller temperature is precisely controlled.
- DFR lamination tension is uniformed (Non-tension lamination and tenting lamination are available.)
- Corresponding to protective tape lamination for back-grind process
- Environment friendly design (long life consumable parts, minimizing film consumption etc.)
- Improved workability
Specification
Item | ATM-1100K |
Wafer Size | 4″, 5″, 6″, 8″ |
Film Width | 130~230mm width |
Utilities – Power | AC200V Single phase 50/60Hz 4.0 KVA |
Utilities – Air | 0.4-0.5Mpa 90NL/min |
Utilities – Vacuum sourse | ~74Kpa |
Dimensions | D1,340 X W1,030 X H1,750 mm (signal tower light not including) |
Weight | 700kg |