300MM Fully-Automatic Wafer BG Tape Lamination Machine
(ATM-3100A)
Feature
- Laminate tape with heater roller and heater table.
- Optimal lamination condition can be set to various tape kind.
- Tape tension controlling system allows free-tension lamination.
- Applicable to 8 and 12 inch wafer.
- FOUP opener(option)
- Throughput: 70 wafers/hr (it varies depending on lamination condition.)
Specification
| Item | ATM-3100A |
| Wafer Size | 8″, 12″ |
| Film Width | 8″: 230mm width; 12″: 330mm width |
| Utilities – Power | AC200V Single phase 50/60Hz 3.0 KVA |
| Utilities – Air | 0.6-0.8Mpa 100L/min(ANR) |
| Utilities – Vacuum sourse | ~74Kpa |
| Dimensions | D1,450 X W1,650 X H2,020 mm |
| Weight | 600kg |
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