300MM UV Machine
(TUV-12)
Feature
- As the works will be moved with irradiating the UV, it is possible to irradiate the UV equally.
- Setting of light volume can be set by transferring speed on UV irradiation part. The machine has measurement mode for light volume already set automatically.
-
Easier Lamp Conversion: UV irradiation unit can be slid from the machine main frame to the front for replacing the lamp.
Specification
| Item | TUV-12 |
| Throughput | 90 wafers/h (UV time excluded) |
| Frame Size | 8″, 12″ |
| UV Irradiance | 100~600mj/cm2 |
| Utilities – Power | AC200V Three phase 60Hz 50A |
| Utilities – Air | 0.4-0.5Mpa |
| Dimensions | D1,340 X W1,760 X H1,570 mm |
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sales
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sales2024-08-26 14:48:492024-08-26 14:50:19UV Meter
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bouncin
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bouncin2016-10-24 17:59:442024-08-20 16:02:41300MM UV Machine (TUV-12)