300MM UV Machine

(TUV-12)

Feature

  1. As the works will be moved with irradiating the UV, it is possible to irradiate the UV equally.
  2. Setting of light volume can be set by transferring speed on UV irradiation part. The machine has measurement mode for light volume already set automatically.
  3. Easier Lamp Conversion: UV irradiation unit can be slid from the machine main frame to the front for replacing the lamp.

Specification

Item
TUV-12
Throughput

90 wafers/h (UV time excluded)
Frame Size
8″, 12″
UV Irradiance100~600mj/cm2
Utilities – Power

AC200V Three phase 60Hz 50A
Utilities – Air

0.4-0.5Mpa
Dimensions
D1,340 X W1,760 X H1,570 mm

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