Wafer Cleaner (CL Series) – 東洋技術股份有限公司

Wafer Cleaner

(CL Series)

Feature

Machine models	CL-6801	CL-1201
Iron frame dimensions	8 inches	12 inches
Cleaning methods	Water + air mix into two fluids	Water + air mix into two fluids
Spindle variable frequency motor	1/2 horsepower	1 horsepower
Speed range	0~3000 rpm (recommended startup speed 200~3000 rpm).	0~3000 rpm (recommended startup speed 200~3000 rpm).
Recipe parameter settings	10	10
Step count	8	8
Air input pressure	0.3~0.5 MPa (Φ8mm flexible tube).	0.3~0.5 MPa (Φ8mm flexible tube).
Maximum air consumption	100 liters/min	100 liters/min
N2 is the input pressure	0.3~0.5 MPa (Φ8mm flexible tube).	0.3~0.5 MPa (Φ8mm flexible tube).
N2 maximum consumption	80 liters/minute	80 liters/minute
Water input pressure	0.2~0.4 MPa(Φ8mm 柔性軟管)。	0.2~0.4 MPa(Φ8mm 柔性軟管)。
Maximum water usage	1 liter/minute	1 liter/minute
Volume of exhaust gas in the exhaust pipe	5 cubic meters per minute (cmm).	5 cubic meters per minute (cmm).
Exhaust duct dimensions	Outer diameter: Φ 76mm	Outer diameter: Φ 76mm
Drainage pipe dimensions	Outer diameter Φ34mm	Outer diameter Φ34mm
Mechanical dimensions	500 (West) * 850 (length) * 1200 (H) mm	About 170 kilograms