300MM 晶圆撕片机
(ATRM-4000A)
特性
- 可撕除12吋晶圆上的保护胶带。
- 提篮和工作区分开通过可节省空间。
- 维持晶圆片在无压力下撕除胶带。
- 交互模式使得操作更简便。
- FOUP 提篮, AGV and OHT 结合, 内建UV机。 (选配)
规格表
| Item | ATRM-4000A |
| Throughput | 70 wafer/h (Depend on data setting) |
| Wafer Size | 8″, 12″ |
| Tape Width | 8″: 50~75mm; 12″: 75~100mm |
| Utilities – Power | AC100V Single phase 50/60Hz 2.5 KVA |
| Utilities – Air | Pressure 0.4Mpa 100N1/min(ANR) |
| Utilities – Vacuum sourse | ~74Kpa |
| Dimensions | D1,625 X W1,350 X H1,800 mm |
| Weight | 600kg |
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sales2024-06-13 17:11:092024-08-26 17:34:43200mm全自动晶圆撕片机(ATRM-22400TKUV)
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sales2016-11-02 16:04:212024-08-23 10:46:53300MM 晶圆撕片机 (ATRM-4000A)
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sales2016-11-02 15:59:232024-08-20 15:34:26200MM 晶圆撕片机 (ATRM-2300)