Semi-Automatic Wafer Mounter with Vacuum Chamber
(SAM-8)
Feature
- Non-contact mounting table which holds wafer at 3mm edge part. (Vacuum for wafer holding is not necessary.)
- The adoption of a vacuum chamber system allows for reduced stress on the attachment rollers and the elimination of air bubbles, thereby preventing damage to the wafers and packages.
- Tension control for all types of tapes is possible, so the optimal coating can be achieved to match post-processing requirements.
- Automatic tape supply, tape coiling, wastage tape coiling, tape cutting.(UV tape applicable)
- Applicable for thin wafer.
Specification
Item | SAM-8 |
Throughput | 35 sec/wafer(from 2nd wafer expect the operater is handing time) (Depend on data setting) |
Wafer Size | 4″, 5″, 6″, 8″ |
Frame Size | 6″, 8″ |
Film Width | 6″: 230mm; 8″: 300mm |
Utilities – Power | AC100V Single phase 50/60Hz 1.5 KVA |
Utilities – Air | Pressure 0.5Mpa 30N1/min |
Utilities – Vacuum sourse | Using venturi valve |
Dimensions | D1,330 X W810 X H1,480 mm |
Weight | 365kg |