Semi-Automatic Wafer Mounter with Vacuum Chamber

(SAM-8)

Feature

  1.  Non-contact mounting table which holds wafer at 3mm edge part. (Vacuum for wafer holding is not necessary.)
  2. The adoption of a vacuum chamber system allows for reduced stress on the attachment rollers and the elimination of air bubbles, thereby preventing damage to the wafers and packages.
  3. Tension control for all types of tapes is possible, so the optimal coating can be achieved to match post-processing requirements.
  4. Automatic tape supply, tape coiling, wastage tape coiling, tape cutting.(UV tape applicable)
  5. Applicable for thin wafer.

Specification

Item
SAM-8
Throughput

35 sec/wafer(from 2nd wafer expect the operater is handing time)
(Depend on data setting)
Wafer Size
4″, 5″, 6″, 8″
Frame Size6″, 8″
Film Width6″: 230mm; 8″: 300mm
Utilities – Power

AC100V Single phase 50/60Hz 1.5 KVA
Utilities – Air

Pressure 0.5Mpa 30N1/min
Utilities – Vacuum sourseUsing venturi valve
Dimensions
D1,330 X W810 X H1,480 mm
Weight
365kg

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