300mm 全自動貼片機附撕片功能
(ATM-12000DR)
特性
- 能讓12吋150um厚度晶圓精確對準。
- 真空室可消除氣泡，減少損壞晶圓。
- 通過獨特的方法在沒有任何壓力情況下撕除晶圓上的BG膠帶。
規格表
| Item | ATM-12000DR |
| Throughput | 40 wafers/h (Depend on data setting) |
| Wafer Size | 8″, 12″ |
| Frame Size | 8″, 12″ |
| Frame Width | 8″: 300mm; 12″: 400mm (Removal tape width: 50mm) |
| Utilities – Power | AC200V Three phase 50/60Hz 5.0 KVA |
| Utilities – Air | Pressure 0.5Mpa 200N1/min |
| Utilities – Vacuum sourse | Using venturi valus |
| Dimensions | D2,800 X W1,800 X H1,800 mm |
| Weight | 2,000kg |
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sales2016-11-02 15:40:142019-04-24 16:25:28200mm 晶圓全自動貼片機 (ATM-8200)
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sales2016-11-02 15:13:562019-04-24 16:27:08300mm 全自動貼片機附撕片功能(ATM-12000DR)