300MM 全自动贴片机附撕片功能
(ATM-12000DR)
特性
- 能让12吋150um厚度晶圆精确对准。
- 真空室可消除气泡，减少损坏晶圆。
- 通过独特的方法在没有任何压力情况下撕除晶圆上的BG胶带。
规格表
| Item | ATM-12000DR |
| Throughput | 40 wafers/h (Depend on data setting) |
| Wafer Size | 8″, 12″ |
| Frame Size | 8″, 12″ |
| Frame Width | 8″: 300mm; 12″: 400mm (Removal tape width: 50mm) |
| Utilities – Power | AC200V Three phase 50/60Hz 5.0 KVA |
| Utilities – Air | Pressure 0.5Mpa 200N1/min |
| Utilities – Vacuum sourse | Using venturi valus |
| Dimensions | D2,800 X W1,800 X H1,800 mm |
| Weight | 2,000kg |
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sales2016-11-02 15:13:562019-04-24 16:16:09300MM 全自动贴片机附撕片功能 (ATM-12000DR)
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sales2016-11-02 14:57:192019-04-24 16:16:50半自动真空室晶圆贴片机 (SAM-8)