200MM 全自动真空晶圆贴片机
(TEAM-100ARF)
特性
- 可使用DRF胶带在wet resist process。
- 可用小于晶圆表面的胶带与面积板电极的镜片暴露边缘部分。
- 在真空室贴合胶带可减少气泡和破片的发生。
- 在无压力下贴合胶带。
规格表
| Item | TEAM-100ARF |
| Throughput | Depending on film type and using conditions. |
| Wafer Size | 5″, 6″, 8″ |
| Film Width | 5″: 150~160mm width; 6″: 180~200mm width; 8″: 225~230mm width |
| Utilities – Power | AC100V Single phase 50/60Hz 2.0 KVA |
| Utilities – Air | Pressure 0.5Mpa 100N1/min |
| Utilities – Vacuum sourse | ~74 Kpa |
| Dimensions | D1,190 X W1,490 X H1,660 mm |
| Weight | 600kg |
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345
407
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600
800
sales
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sales2016-11-02 14:43:382024-08-20 15:36:06200MM 全自动真空晶圆贴片机 (TEAM-100ARF)