200mm 晶圓全自動貼片機
(ATM-8200)
特性
- 全世界佔用空間最小的晶圓貼片機。
- 由於使用超薄滾筒層且有真空室所以產品無損傷、氣泡。
- 張力控制盡可能讓所有類型的膠帶，可以達到後端處理要求。
- 可適用在THIN WAFER上。
規格表
| Item | ATM-8200 |
| Throughput | 95 wafers/h (Depend on data setting) |
| Wafer Size | 4″, 5″, 6″, 8″ |
| Frame Size | 6″, 8″ |
| Film Width | 6″: 230mm; 8″: 300mm |
| Accuracy in Positioning Wafer | ±0.5mm in X-Y direction and ±0.5mm in θangle (against frame) |
| Utilities – Power | AC100V Single phase 50/60Hz 2.0 KVA |
| Utilities – Air | Pressure 0.5Mpa 300N1/min |
| Utilities – Vacuum sourse | Using venturi valus |
| Dimensions | D1,150 X W1,330 X H1,800 mm |
| Weight | 700kg |
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